DTIC ADA215439: Computer Aided Fabrication of Integrated pdf

DTIC ADA215439: Computer Aided Fabrication of Integrated

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The major objective of this research program is to develop a Computer Aided Fabrication (CAF) environment to support the design, implementation, and manufacturing of processes for integrated circuits with special emphasis on prototyping and application specificity. The primary testbed for all components of the CAF system is the Integrated Circuits Lab at MIT. These components are the result of research in five areas: CAF system architecture; Modular process design; Scheduling of fabrication events; Equipment modeling; and Mechanical property TCAD. Computer aided design; VLSI; Integrated circuits; Three dimensional; Computer aided manufacturing. (edc

• Creator/s: Defense Technical Information Center
• Date: 9/30/1989
• Year: 1989
• Book Topics/Themes: DTIC Archive, Penfield, Paul, Jr, MASSACHUSETTS INST OF TECH CAMBRIDGE MICROSYSTEMS TECHNOLOGY LABS, *COMPUTER AIDED MANUFACTURING, *INTEGRATED CIRCUITS, *COMPUTER AIDED DESIGN, MANUFACTURING, MODELS, FABRICATION, PROTOTYPES, MODULAR CONSTRUCTION, THREE DIMENSIONAL, INTEGRATION, SCHEDULING, LABORATORIES, TEST BEDS, ARCHITECTURE, METHODOLOGY, MECHANICAL PROPERTIES

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