DTIC ADA217804: Laser and Particle Beam Chemical pdf

DTIC ADA217804: Laser and Particle Beam Chemical

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Description of the Book:

The Materials Research Society held their symposium ‘Laser & Particle-Beam Chemical Processes on Surfaces’ in Boston, Massachusetts on November 28 – December 3, 1988. Parts I thru X of this report discuss the following research topics: Overview of Laser- and Beam-Induced Surface Processes; Laser-Induced Deposition of Metal Films; Laser-Induced Writing of Metal Lines; Laser-Induced Deposition of Semiconductors; Laser-Induced Chemical Etching; Laser-Induced Surface Ablation; Laser-Induced Surface Modification; Ion-, Electron-, and Plasma-Assisted Chemistry; and Integrated Circuits Fabricated Technology. (JG

• Creator/s: Defense Technical Information Center
• Date: 12/26/1989
• Year: 1989
• Book Topics/Themes: DTIC Archive, Johnson, A W, MATERIALS RESEARCH SOCIETY PITTSBURGH PA, *LASERS, MASSACHUSETTS, CHEMICALS, MODIFICATION, MATERIALS, METAL FILMS, SEMICONDUCTORS, ETCHING, SURFACES, DEPOSITION, CHEMICAL REACTIONS, WRITING, LASER DAMAGE, PARTICLE BEAMS, ABLATION, SOCIETIES

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