DTIC ADP014990: Radiofrequency Glow Discharges Used for pdf

DTIC ADP014990: Radiofrequency Glow Discharges Used for

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Glow discharge optical emission spectroscopy (GD-OES) is an analytical technique widely used for elemental and depth profiling analysis of materials 1. The technique is based on the analysis of the optical emission of atoms sputtered from the cathode and excited in the plasma. Radio frequency excitation of the glow discharge (RF-GD-OES) is developed for quantitative analysis of non-conductive samples. Capacitively coupled radio frequency discharges have been extensively studied both experimentally and theoretically over the past decade in the context of plasma processing for the microelectronics industry and thus these discharges are fairly well understood 2-3. The operating conditions used in RF-GDOES are, however, different than those standardly used in plasma processing, leading to a discharge behavior quite unusual and it is our aim to understand this behavior

• Creator/s: Defense Technical Information Center
• Date: 7/20/2003
• Year: 2003
• Book Topics/Themes: DTIC Archive, Therese, L., Guillot, Ph., Belenguer, Ph., TOULOUSE-3 UNIV (FRANCE), *EMISSION SPECTROSCOPY, *GLOW DISCHARGES, *RADIOFREQUENCY, OPTICAL PROPERTIES, EXPERIMENTAL DATA, QUANTITATIVE ANALYSIS, SYMPOSIA, PLASMAS(PHYSICS), EXCITATION, CATHODES, MATHEMATICAL ANALYSIS, MICROELECTRONICS, FRANCE

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