NASA Technical Reports Server (NTRS) : X pdf

NASA Technical Reports Server (NTRS) : X

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X-ray masking apparatus includes a frame having a supporting rim surrounding an x-ray transparent region, a thin membrane of hard inorganic x-ray transparent material attached at its periphery to the supporting rim covering the x-ray transparent region and a layer of x-ray opaque material on the thin membrane inside the x-ray transparent region arranged in a pattern to selectively transmit x-ray energy entering the x-ray transparent region through the membrane to a predetermined image plane separated from the layer by the thin membrane. A method of making the masking apparatus includes depositing back and front layers of hard inorganic x-ray transparent material on front and back surfaces of a substrate, depositing back and front layers of reinforcing material on the back and front layers, respectively, of the hard inorganic x-ray transparent material, removing the material including at least a portion of the substrate and the back layers of an inside region adjacent to the front layer of hard inorganic x-ray transparent material, removing a portion of the front layer of reinforcing material opposite the inside region to expose the surface of the front layer of hard inorganic x-ray transparent material separated from the inside region by the

latter front layer, and depositing a layer of x-ray opaque material on the surface of the latter front layer adjacent to the inside region

• Creator/s: NASA Technical Reports Server (NTRS
• Date: 9/15/1998
• Year: 1998
• Book Topics/Themes: NASA Technical Reports Server (NTRS), LITHOGRAPHY, MASKING, MEMBRANES, TRANSPARENCE, X RAY APPARATUS, X RAYS, PATENTS, Smith, Henry I. [Inventor]Lim, Michael [Inventor]Carter, James [Inventor]Schattenburg, Mark [Inventor

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